Publications of VALIEV IPT RAS, YB members for 2024 year
- Uvarov I.V., Belozerov I.A. Design guideline for a cantilever-type MEMS switch with high contact force // Micro. – 2024. – Vol. 4. – P. 1-13. DOI: 10.3390/micro4010001
Valiev Institute of Physics and Technology of Russian Academy of Sciences, Yaroslavl Branch